Rayleigh scattering, mode coupling, and optical loss in silicon microdisks
نویسندگان
چکیده
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.23105, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 mm are studied, with measured quality factors as high as 4.73105 for an optical mode volume of 5.3 sl /nd3. © 2004 American Institute of Physics. [DOI: 10.1063/1.1811378]
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